Innovation in Clean-Room Automation

Tec-Sem is leading supplier for high-end automation equipment for reticle, wafer and carrier handling, storage and management in the semiconductor industry. The patented Tec-Cell® technology allows ultra-dense, ultra-clean, cost-effective and higly productive solutions.

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What TEC-SEM has for you

Tec-Sem’s wafer and reticle management systems are crucial to productivity improvements and help increasing the efficiency and throughput in numerous semiconductor fabs around the world. The systems are based on over 30 years of application know-how and experience in clean room automation as well as vacuum and purge technologies.

Tec-Sem’s proprietary and unique technology used in its wafer- and reticle management systems is characterized by an ultra-dense, highly cost-effective storage method, based on the Tec-Cell® technology, wafers and reticles are stored "bare", rather than in carriers and are kept in a local class 1 micro environment. The inert gas stream is applied in a controlled way to allow an optimized linear flow.

The Tec-Sem equipment can handle all type of reticles and wafers, bare or in pods or carriers either as dedicated tools or as multipurpose equipment.

An experienced and highly qualified Team of sales and service professionals support the customers throughout the entire world.

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Our Products

Improve your fab productivity with state of the art equipment


Wafer Management Solutions

High-throughput and high density scalable stocker with wafer management system and Class 1 environment for 200mm and 300mm test and production wafers with optional N2/xCAD purge possibility. The systems guarantee reliable, particle free wafer handling with a low cost per meter of clean room footprint. Tools can be standalone or integrated into the customers AHMS

Reticle Management Solutions

A unique leading edge reticle and reticle pod storage and management solutions with configurable and modular architecture and with optional inspection and cleaning features. The Class 1 microenvironment with inert gas purge availability, guarantees clean reticle handling and storage.The best in class equipment can handle numerous types of reticles and pods and is essential to productivity improvements of wafer fabs and mask houses.


Our custom wafer handling solutions help to improve throughput and efficiency of semiconductor process equipment.

About TEC-SEM Group

Over 30 years experience in semiconductor and clean room automation


Dirk Sinerius PhD

Chief Executive Officer

Olaf Faller

Chief Operation Officer

Iris Kaderli

Chief Financial Officer


Our sales and service organization is ready for you around the world.
24/7 Help Desk Phone: + 41 71 666 72 34


News and Events

News and Events

Annual Shareholders Meeting 2018 23 April 2018

The Annual Shareholders Meeting 2018 of Tec-Sem Group AG took place on Monday 23rd April 2018 at 10.00am at the...

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We are a young and dynamic Team with international customers worldwide. If you are interested in one of the openings, please do not hesitate to contact us.

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For further information on products, services or the company please contact us through the contact page or give us a call.

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